| 000 | 00356nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 220419s1997 xx 000 0 und d | ||
| 020 | _a123520657 | ||
| 041 | _aeng | ||
| 082 | _a621.55 | ||
| 100 | _aHoffman D.M. | ||
| 245 | _aHandbook of Vaccum Science and Technology | ||
| 260 |
_bElsevier Sci.Tech. _c1997 |
||
| 300 | _a835p | ||
| 650 | _aElectronics | ||
| 999 |
_c294664 _d294664 |
||