000			00353nam a2200145Ia 4500
008			220419s2018 xx 000 0 und d
020			_a9781498782043
041			_aeng
082			_a621.55
100			_aBello I.
245			_aVaccum and Ultra vaccum physics and Technology
260			_bCRC Press _c2018
300			_a1036p
650			_aElectronics
999			_c294670 _d294670